Substrate temperature effects on reactively sputtered Cr2O3/n-Si heterojunctions
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چکیده
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Effect of substrate temperature and deposition rate on the photoconductivity of sputtered a-Si : H
2014 The variation of the photoconductivity versus photon energy is reported for samples deposited at 150 °C, 190 °C and 250 °C at low (30 Å/min.) and high (~ 150 Å/min.) deposition rates. The spin densities of the same samples are also reported. Taking into account the hydrogen concentration and distribution in these samples, a model according to the photoconductivity is mainly limited by the ...
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The nanocrystallization process of reactively sputtered thin amorphous Ta–Si–N films is investigated by anomalous small angle x-ray scattering ~ASAXS! and x-ray diffraction ~XRD!. Changes in the microstructure in Ta40Si14N46 films, density variations in the amorphous matrix, decomposition, formation, and growth of nanocrystals after vacuum anneals at different temperatures in the range between ...
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Amorphous Ta-oxide and Sn-nitride thin films were prepared by reactive sputter deposition on smooth float glass substrates and investigated ex situ using reflection mode XAFS. The absorption coefficient mu and its fine structure were extracted from the measured reflection mode XAFS spectra with a method based on the Kramers-Kronig transform. Bond distances, coordination numbers and Debye-Waller...
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The surface resistance of niobium nitride {NbN) thin films has been measured at 7. 78 and 10.14 GHz in the temperature range of 1.5 to 4.2 K. The films were reactively sputtered on sapphire substrates to a thickness of approximately 1 micron. The surface resistance was determined by measuring the quality factor (Q) of the TEo] 1 mode of a lead-plated copper cavity where the NbN served as one en...
متن کاملOhmic contacts on sputtered a-Si : H
2014 We show that ohmic contacts can be obtained by hydrogen depletion in a-Si : H. We obtain these ohmic contacts by diffusion of hydrogen into adjacent films of pure a-Si at 190 °C or Pd at room temperature. J. Phrsigcue LETTRES 41 (19RO) L-27 L-29 15 JANVIER 1980, Classification Physics Abstracts 73.40N Following the work of the Dundee [1] and R.C.A. [2] groups, several laboratories have tri...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2016
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/707/1/012026